ENVIRONMENT SENSOR AND METHOD FOR OPERATING AN ENVIRONMENT SENSOR

The invention relates to an environment sensor (100), comprising: - a MEMS element (10); - an ASIC element (20) electrically connected to the MEMS element (10) by means of at least two bonding wires (2a, 2b), wherein the ASIC element (20) has an evaluation circuit (40, 50, 60) which is designed to d...

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Bibliographische Detailangaben
Hauptverfasser:	SLOGSNAT, David, MUSAZZI, Massimiliano, KREUTZER, Joachim, TANGREDI, Domenico, SANTORO, Manuel Salvatore
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention relates to an environment sensor (100), comprising: - a MEMS element (10); - an ASIC element (20) electrically connected to the MEMS element (10) by means of at least two bonding wires (2a, 2b), wherein the ASIC element (20) has an evaluation circuit (40, 50, 60) which is designed to determine and evaluate a parasitic capacitance (Cp) between the at least two bonding wires (2a, 2b) connected to pads (3a, 3b) of the MEMS element (10) in order to detect a material deposit on the environment sensor (100).