PRESSURE SENSOR ASSEMBLY AND METHOD FOR PRODUCING A PRESSURE SENSOR ASSEMBLY

The invention relates to a pressure sensor assembly (100), having - a sensor element (202) with an upper face (118) and a lower face (204), wherein the sensor element (202) has a diaphragm (106) which is designed and arranged so as to be exposed to a medium, and the sensor element (202) has at least...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	BOHL, Benjamin, EBERSTEIN, Markus, STENDEL, Thomas
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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Beschreibung
Zusammenfassung:	The invention relates to a pressure sensor assembly (100), having - a sensor element (202) with an upper face (118) and a lower face (204), wherein the sensor element (202) has a diaphragm (106) which is designed and arranged so as to be exposed to a medium, and the sensor element (202) has at least one detection element (109) for measuring the pressure of the medium, and - a substrate (104) which is used as a support for the sensor element (202), said substrate (104) containing glass. A connection interface (201) which is produced by laser welding is formed between the sensor element (202) and the substrate (104), and the sensor element (202) and the substrate (104) are connected together on the connection interface (201) in a mechanically fixed and hermetic manner. The invention additionally relates to a method for producing a pressure sensor assembly (100).