MEMS DEVICE AND METHOD FOR OPERATING A MEMS DEVICE

A MEMS device comprises a cavity for emitting a fluid and a pump structure configured for generating a pressure of the fluid in the cavity and for providing the fluid under pressure. The MEMS device comprises a sensor unit configured for sensing an electrical parameter that is based on an electrical...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	EVERSMANN, Bjoern Oliver, BRETTHAUER, Christian, HEISS, Heinrich Guenther, BERNACCHIA, Giuseppe, WIESBAUER, Andreas, HAUBOLD, Marco, MAYRHOFER, Dominik
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BLASTING DEAF-AID SETS DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROMTHE BODY ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY HEATING HUMAN NECESSITIES HYGIENE LIGHTING LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MECHANICAL ENGINEERING MEDICAL OR VETERINARY SCIENCE POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUBLIC ADDRESS SYSTEMS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A MEMS device comprises a cavity for emitting a fluid and a pump structure configured for generating a pressure of the fluid in the cavity and for providing the fluid under pressure. The MEMS device comprises a sensor unit configured for sensing an electrical parameter that is based on an electrical impedance of the pump structure. The sensor unit provides a sensor signal based on the electrical parameter. The MEMS device comprises a control unit configured for controlling an operation of the pump structure. The control unit is configured for processing the sensor signal for adapting an operation of the MEMS device and/or for failure detection.