REDUCING DAMAGE DURING SPACER DEPOSITION

A semiconductor structure includes a semiconductor channel structure that has a body and a tip and a dielectric spacer adjacent to the tip. The tip is no less than 70% the thickness of the body.

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Bibliographische Detailangaben
Hauptverfasser:	XIE, Ruilong, GLUSCHENKOV, Oleg, JAGANNATHAN, Hemanth, FROUGIER, Julien
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A semiconductor structure includes a semiconductor channel structure that has a body and a tip and a dielectric spacer adjacent to the tip. The tip is no less than 70% the thickness of the body.