ACCELEROMETER INCLUDING PROOF MASS FORMED BY SELECTIVE LASER ETCHING

An example proof mass includes a substrate; one or more etched apertures in the substrate; and one or more integrated coils, wherein the one or more etched apertures are formed by selective laser etching, wherein the one or more integrated coils are formed by laser ablation.

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Bibliographische Detailangaben
1. Verfasser:	DWYER, Paul W
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	An example proof mass includes a substrate; one or more etched apertures in the substrate; and one or more integrated coils, wherein the one or more etched apertures are formed by selective laser etching, wherein the one or more integrated coils are formed by laser ablation.