SUBSTRATE GRIPPER AND METHOD FOR MOVING A SUBSTRATE USING THE SAME

Disclosed herein are a substrate gripper and a method of transferring a substrate using the same, which include a frame, a plurality of pad holes connected to the frame, and a plurality of suction pads disposed on the frame and connected to the pad holes, wherein the suction pad has a contact surface which comes into contact with one surface of a target substrate when the target substrate is mounted, the suction pad includes a first suction pad having a contact surface at a first height, without supporting the target substrate, and a second suction pad having a contact surface at a second height in a state of not supporting the target substrate, and the first height is greater than the second height based on the frame. In this way, the substrate gripper can stably suction and support the target substrate even when warpage occurs. In addition, the substrate gripper has a strong vertical gripping force and a strong horizontal gripping force and is capable of stably suctioning and supporting the target substrate.