AN ILLUMINATION MODULE FOR A METROLOGY DEVICE

Disclosed is an illumination configuration module comprising: a radiation modulation device being operable to receive spectrally dispersed broadband input radiation on an active area and to selectively diffract a diffracted fraction of said spectrally dispersed broadband input radiation to obtain sp...

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Bibliographische Detailangaben
Hauptverfasser:	EURLINGS, Markus Franciscus Antonius, VAN GREEVENBROEK, Hendrikus, Robertus, Marie, VAN VOORST, Peter, Danny, KROT, Yury, SONNEVELD, Jacob
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	Disclosed is an illumination configuration module comprising: a radiation modulation device being operable to receive spectrally dispersed broadband input radiation on an active area and to selectively diffract a diffracted fraction of said spectrally dispersed broadband input radiation to obtain spectrally configured radiation comprising desired diffracted radiation and nuisance diffracted radiation; and at least one spectral filter operable to substantially block a spectral portion of said spectrally configured radiation, the spectral portion comprising said nuisance diffracted radiation.