METHOD OF OPERATING A COATING SYSTEM, CONTROLLER FOR OPERATING A COATING SYSTEM, ELECTRON CATCHING APPARATUS, AND COATING SYSTEM

A method of operating a coating system provided in a vacuum chamber is described. The coating system includes a coating drum for transporting a substrate, at least one electron beam gun for evaporating a coating material, and an electron catcher. The electron catcher includes an anode for collecting...

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Bibliographische Detailangaben
Hauptverfasser:	DIETER, Torsten Bruno, BRAUNGER, Steffen, JENDRZEY, Andreas, KLIEMT, Markus
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A method of operating a coating system provided in a vacuum chamber is described. The coating system includes a coating drum for transporting a substrate, at least one electron beam gun for evaporating a coating material, and an electron catcher. The electron catcher includes an anode for collecting free electrons in the vacuum chamber. The anode is heatable via a heating current. The electron catcher is configured such that the heating current passes through the anode or the electron catcher includes a resistive heater thermally coupled with the anode, with the electron catcher being configured such that the heating current passes through the resistive heater. The method includes: an automatic adjustment of at least one parameter selected from a group consisting of: the heating current, a DC bias voltage of the anode, a position of the anode, and a pressure in the vacuum chamber. The automatic adjustment includes a measurement of an electron collection current passing through the anode.