FLEXIBLE STAMP AND METHOD FOR MANUFACTURING A FLEXIBLE STAMP

The invention relates to flexible stamp configured for imprinting, in particular nanoimprinting, and a method for manufacturing such stamp. The stamp (200) comprises a substantially flexible substrate (201), said substrate comprising at least one textured area (202), at least one functional element...

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Bibliographische Detailangaben
Hauptverfasser:	TER MEULEN, Jan Matthijs, DEKKER, Tim, NEELEN, Rob Antonius Waltherus
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR MICROSTRUCTURAL TECHNOLOGY ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention relates to flexible stamp configured for imprinting, in particular nanoimprinting, and a method for manufacturing such stamp. The stamp (200) comprises a substantially flexible substrate (201), said substrate comprising at least one textured area (202), at least one functional element (203) and at least two conductive tracks (204) which are connected or connectable to the at least one functional element.