VIBRATION SENSING FOR MACHINING A WORKPIECE WITH A LIQUID-JET-GUIDED LASER BEAM

This disclosure relates to an apparatus for machining a workpiece with a laser beam guided by a liquid jet. The apparatus comprises a nozzle for producing the liquid jet, at least one lens for coupling the laser beam into the liquid jet, and a housing enclosing at least the nozzle and having an aper...

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Bibliographische Detailangaben
Hauptverfasser: Diboine, Jérémie, Zryd, Amédée, Wasmer, Kilian, Shevchik, Sergey, Richerzhagen, Bernold, Braunmüller, Falk
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:This disclosure relates to an apparatus for machining a workpiece with a laser beam guided by a liquid jet. The apparatus comprises a nozzle for producing the liquid jet, at least one lens for coupling the laser beam into the liquid jet, and a housing enclosing at least the nozzle and having an aperture for providing the liquid jet onto the workpiece. A vibration sensor of the apparatus is attached to the housing, and is configured to measure at least a first vibration of the housing and/or a second vibration of the housing, the first vibration being caused by machining the workpiece, and the second vibration being caused by the liquid jet. Further, a processor of the apparatus is configured to determine, based on the first vibration and/or the second vibration, a first set of parameters related to machining the workpiece and/or a second set of parameters related to the liquid jet.