SHEET FIXING DEVICE, SHEET PEELING DEVICE, AND SHEET PEELING METHOD

There is provided a sheet fixing apparatus capable of suppressing occurrence of leak between a multilayer sheet and a support stage to secure adhesive force when fixing one surface of the multilayer sheet and releasing a layer on an opposite side thereto. The sheet fixing apparatus includes a suppor...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	MATSUURA, Yoshinori, KOMIYA, Mikiko, NAKAMURA, Toshimi, KITABATAKE, Yukiko, YANAI, Takenori
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS,CABLES PACKING PERFORMING OPERATIONS SEMICONDUCTOR DEVICES STORING TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	There is provided a sheet fixing apparatus capable of suppressing occurrence of leak between a multilayer sheet and a support stage to secure adhesive force when fixing one surface of the multilayer sheet and releasing a layer on an opposite side thereto. The sheet fixing apparatus includes a support stage for supporting the multilayer sheet, and suction means capable of sucking the multilayer sheet toward the support stage via a suction hole. The support stage has a plate-shaped member having a flat surface on which the multilayer sheet can be placed, a suction hole provided at a position corresponding to an outer peripheral portion of the multilayer sheet in the plate-shaped member, and a step portion provided along an outside of the suction hole in the plate-shaped member. The flat surface of the plate-shaped member has a flatness of 0.30 mm or less as defined by JIS B0621-1984.