INNER RETICLE POD COVER AND BASEPLATE SHIPPER

Shipping containers for covers or baseplates of reticle pods include a first shell including first fixing features and a second shell including second fixing features. When the first shell and the second shell are joined, the shells define an internal space capable of accommodating a cover or a base...

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Bibliographische Detailangaben
Hauptverfasser:	TIEBEN, Anthony Mathius, RASCHKE, Russ V, GLYNN, Philip Stuart
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	Shipping containers for covers or baseplates of reticle pods include a first shell including first fixing features and a second shell including second fixing features. When the first shell and the second shell are joined, the shells define an internal space capable of accommodating a cover or a baseplate of a reticle pod, and the fixing features engage the cover or baseplate to prevent movement of the cover or baseplate in directions in plane with the first or second shells. The fixing features can be such that there are both rigid and elastic fixing features contacting the cover or baseplate. A method of storing a cover or baseplate can include placing the cover or baseplate between first and second shells and joining the first and second shells to one another.