DEVICE FOR COATING A STRIP-SHAPED SUBSTRATE WITH A PARYLENE LAYER

The invention relates to a device for coating a strip-shaped substrate (2) with a parylene layer within a working chamber (1), comprising a) a take-off roller (3) for unwinding the strip-shaped substrate (2); b) a take-up roller (5) for winding the strip-shaped substrate (5) after the coating proces...

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Bibliographische Detailangaben
Hauptverfasser:	TOP, Michiel, SELBMANN, Franz, TÖRKER, Emmy
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PERFORMING OPERATIONS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SPRAYING OR ATOMISING IN GENERAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention relates to a device for coating a strip-shaped substrate (2) with a parylene layer within a working chamber (1), comprising a) a take-off roller (3) for unwinding the strip-shaped substrate (2); b) a take-up roller (5) for winding the strip-shaped substrate (5) after the coating process; c) a processing roller (4), around which the strip-shaped substrate (2) is partly wrapped and by means of which the strip-shaped substrate (2) can be led past a coating zone (5); d) a first housing (10) which surrounds the coating zone (5) and which has a first opening directed toward the substrate (2), the first opening being surrounded by a first opening edge (13); e) a second housing (12) which has a second opening directed toward the substrate (2), the second opening being surrounded by a second opening edge (13), and the second housing (12) surrounding the first housing (10), as a result of which the second housing (12) delimits a volume (14) between the first housing (10) and the second housing (12); f) at least one inlet (18) which extends through a wall of the first housing (10) and by means of which at least one monomer-containing gas for depositing the parylene layer can be introduced into the coating zone (5); g) at least one pumping apparatus (19), by means of which a negative pressure can be generated in the volume (14) between the first housing (10) and the second housing (12).