PROBE FOR USE IN A PROBE SYSTEM FOR PROBING A SUPERCONDUCTIVE CIRCUIT, METHOD OF PROBING AND OF MANUFACTURING A PROBE
The invention is directed at a probe for use in a probe system for probing a superconductive circuit including at least one quantum device, wherein the quantum device comprises a probe pad made of first material for enabling measuring of a parameter of the quantum device; wherein under cryogenic dev...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | The invention is directed at a probe for use in a probe system for probing a superconductive circuit including at least one quantum device, wherein the quantum device comprises a probe pad made of first material for enabling measuring of a parameter of the quantum device; wherein under cryogenic device operating conditions the first material is a superconductor, and wherein the probe is configured for probing the probe pad for performing said measuring, wherein the probe comprises a probe tip configured to be brought in contact with a contact surface of the probe pad; and wherein the probe tip, on a side thereof which is configured to be brought in contact with the contact surface of the probe pad, comprises on an outer layer which is made of a second material, which second material is same as the first material. |
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