METHOD AND APPARATUS FOR CLEANING CARRIER FILM

Provided are method and apparatus for cleaning a carrier film such as a PET film, which are low in cost and environmental load, in cleaning of the carrier film for recycle.The method for cleaning the carrier film (101) includes spraying water (201) containing microbubbles onto a surface of the carri...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WATANABE, Kousuke, WATANABE, Hisaaki, ASAI, Kazutoshi
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:Provided are method and apparatus for cleaning a carrier film such as a PET film, which are low in cost and environmental load, in cleaning of the carrier film for recycle.The method for cleaning the carrier film (101) includes spraying water (201) containing microbubbles onto a surface of the carrier film having a remaining dielectric ceramic layer (102), thereby peeling the remaining dielectric ceramic layer from the surface. The apparatus for cleaning the carrier film includes a holder (105) that holds the carrier film having a remaining dielectric ceramic layer, and a nozzle (36) that sprays water containing microbubbles onto a surface of the held carrier film to peel the remaining dielectric ceramic layer from the surface.