SEMICONDUCTOR GAS PIPE FITTING FASTENER

A semiconductor gas pipe fitting fastener is disclosed. The semiconductor gas pipe fitting fastener of the present disclosure includes: a female fitting member connected to a first pipe through which gas that is used in a semiconductor process flows; a male fitting member connected with the female f...

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Bibliographische Detailangaben
Hauptverfasser: NOH, Eunsik, LEE, Sunryong
Format: Patent
Sprache:eng ; fre ; ger
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