SEMICONDUCTOR GAS PIPE FITTING FASTENER

A semiconductor gas pipe fitting fastener is disclosed. The semiconductor gas pipe fitting fastener of the present disclosure includes: a female fitting member connected to a first pipe through which gas that is used in a semiconductor process flows; a male fitting member connected with the female f...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	NOH, Eunsik, LEE, Sunryong
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING JOINTS OR FITTINGS FOR PIPES LIGHTING MEANS FOR THERMAL INSULATION IN GENERAL MECHANICAL ENGINEERING PIPES SEMICONDUCTOR DEVICES SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	A semiconductor gas pipe fitting fastener is disclosed. The semiconductor gas pipe fitting fastener of the present disclosure includes: a female fitting member connected to a first pipe through which gas that is used in a semiconductor process flows; a male fitting member connected with the female fitting member by being connected to a second pipe opposite to the first pipe; a female nut member supporting the female fitting member therein; a male nut member supporting the male fitting member therein and configured to connect the female fitting member and the male fitting member by being coupled to the female nut member; and a gasket member supported on a side by the female fitting member, supported on another side by the male fitting member, and configured to prevent leakage of gas from the female fitting member and the male fitting member.