FILM FORMING APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING APPARATUS

A film forming apparatus includes an outer chamber, an inner chamber arranged inside the outer chamber and dividable into a first portion and a second portion, a driving mechanism configured to lift and lower the second portion along an elevator axis, and a plurality of supply paths arranged so as t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	ISHII, Ryuji
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A film forming apparatus includes an outer chamber, an inner chamber arranged inside the outer chamber and dividable into a first portion and a second portion, a driving mechanism configured to lift and lower the second portion along an elevator axis, and a plurality of supply paths arranged so as to be capable of individually supplying a plurality of source gases to a first space which is a space inside the inner chamber. The first portion includes a first seal, and the second portion includes a second seal to come into contact with the first seal. In a longitudinal section along a plane including the elevator axis, a surface of each of the first seal and the second seal has a non-linear shape.