ATOMIC LAYER DEPOSITION IN ACOUSTIC WAVE RESONATORS

Aspects of acoustic resonators and methods of manufacture of acoustic resonators are described, including acoustic resonators with thinner layers of piezoelectric material. In one example, a method of manufacturing an acoustic resonator includes providing a substrate, depositing a layer of piezoelectric material over the substrate by atomic layer deposition (ALD), and forming an electrode in contact with the layer of piezoelectric material. ALD is used to deposit highly uniform and conformal thin films of piezoelectric material and, in some cases, electrodes and encapsulation layers. The acoustic resonators described herein are better suited for the demands of new radio frequency (RF) filters, duplexers, transformers, and other components in front-end radio electronics and other applications.