METHOD FOR ASSESSING SEMICONDUCTOR SAMPLE, DEVICE FOR ASSESSING SEMICONDUCTOR SAMPLE, AND METHOD FOR PRODUCING SEMICONDUCTOR WAFER

Provided is an evaluation method of a semiconductor sample, the method including subjecting a semiconductor sample to be evaluated to measurement with a photoconductivity decay method to acquire a decay curve; subjecting the decay curve to signal data processing by a model expression including an exponential decay term and a constant term; and determining a recombination lifetime of the semiconductor sample from an expression of exponential decay obtained by the above signal data processing.