DEVICE FOR CONTROLLING TRAPPED IONS

DEVICE FOR CONTROLLING TRAPPED IONS

A device (300) for controlling trapped ions (180) includes a substrate. A metal layer is disposed over the substrate (120). An electrode (125, M3) of an ion trap is disposed over the metal layer (135, M2), wherein the electrode is configured to trap one or more ions in a space above the electrode. A...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: RÖSSLER, Clemens, SCHOENHERR, Helmut Heinrich, AUCHTER, Silke Katharina, ZESAR, Alexander
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
GAMMA RAY OR X-RAY MICROSCOPES
IRRADIATION DEVICES
NUCLEAR ENGINEERING
NUCLEAR PHYSICS
PHYSICS
TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:A device (300) for controlling trapped ions (180) includes a substrate. A metal layer is disposed over the substrate (120). An electrode (125, M3) of an ion trap is disposed over the metal layer (135, M2), wherein the electrode is configured to trap one or more ions in a space above the electrode. An electrical insulator (130) is disposed between the metal layer and the electrode. The electrical insulator comprises an upper surface facing towards the electrode and a lower surface facing towards the metal layer. An etching rate of the electrical insulator increases along a direction pointing from the upper surface to the lower surface.