AN ILLUMINATION MODULE FOR A METROLOGY DEVICE

AN ILLUMINATION MODULE FOR A METROLOGY DEVICE

Disclosed is an illumination configuration module comprising: an active area comprising alternating first reflective regions (1010, 1010') and second reflective regions (1020, 1020'), said first reflective regions (1010, 1010') and second reflective regions (1020, 1020') comprisi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: VAN GREEVENBROEK, Hendrikus Robertus Marie, VAN VOORST, Peter Danny
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Beschreibung
Zusammenfassung:Disclosed is an illumination configuration module comprising: an active area comprising alternating first reflective regions (1010, 1010') and second reflective regions (1020, 1020'), said first reflective regions (1010, 1010') and second reflective regions (1020, 1020') comprising a configurable displacement between them, in a direction perpendicular to said active area, so as to selectively form a diffractive grating structure for selectively diffracting dispersed radiation incident on said active area; wherein a local pitch (P1, P2) of said active area, the local pitch (P1, P2) being defined by a combined width of one of said first reflective regions (1010, 1010') and an adjacent one of said second reflective regions (1020, 1020'), varies within said active area.