PATTERNED LOW MELTING GLASS (LMG) PHOTONIC FILM SURFACES BY WET-ETCH PHOTOLITHOGRAPHY

A glass article comprises a film layer deposited on a glass substrate. The film layer has a melting point less than 450°C and comprises a thickness and a primary surface. The primary surface defines at least one elevated surface protruding relative to the at least one relief surface. The elevated su...

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Bibliographische Detailangaben
Hauptverfasser: NELSON, Cameron Robert, WOOD, William Allen, DABICH, II, Leonard Charles, HARDING, Traci Nanette, QUESADA, Mark Alejandro, ZHU, Bin
Format: Patent
Sprache:eng ; fre ; ger
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