HIGH-BRIGHTNESS LASER PRODUCED PLASMA SOURCE AND METHOD OF GENERATING AND COLLECTING RADIATION

A laser produced plasma light source comprises a vacuum chamber (1), a rotating target assembly (2) supplying a target (3) to an interaction zone (4) with a focused laser beam (5). The target is a molten metal layer on a surface of an annular groove of the target assembly. An output beam (7) of shor...

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Bibliographische Detailangaben
Hauptverfasser:	GLUSHKOV, Denis Aleksandrovich, KHRISTOFOROV, Oleg Borisovich, MEDVEDEV, Vyacheslav Valerievich, IVANOV, Vladimir Vitalievich, VINOKHODOV, Aleksandr Yurievich, LASH, Aleksandr Andreevich, KRIVOKORYTOV, Mikhail Sergeyevich, ELLWI, Samir, KOSHELEV, Konstantin Nikolaevich, KRIVTSUN, Vladimir Mikhailovich
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY X-RAY TECHNIQUE
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A laser produced plasma light source comprises a vacuum chamber (1), a rotating target assembly (2) supplying a target (3) to an interaction zone (4) with a focused laser beam (5). The target is a molten metal layer on a surface of an annular groove of the target assembly. An output beam (7) of short-wavelength radiation exits the interaction zone to an optical collector (8) through debris mitigation means (12-16). The linear velocity of the target is preferably not less than 100 m/s and a vector of the linear velocity of the target in the interaction zone is directed on one side of a plane (18) passing through the interaction zone and the rotation axis (6) while the focused laser beam and the output beam are located on another side of said plane.