METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS

METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS

A multi-electron beam system that forms hundreds of beamlets can focus the beamlets, reduce Coulomb interaction effects, and improve resolutions of the beamlets. A Wien filter with electrostatic and magnetic deflection fields can separate the secondary electron beams from the primary electron beams...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: JIANG, Xinrong, JIANG, Youfei, LEE, Jeong Ho, SHRIYAN, Sameet K, NYFFENEGGER, Ralph, STEIGERWALD, Michael, SEARS, Christopher
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:A multi-electron beam system that forms hundreds of beamlets can focus the beamlets, reduce Coulomb interaction effects, and improve resolutions of the beamlets. A Wien filter with electrostatic and magnetic deflection fields can separate the secondary electron beams from the primary electron beams and can correct the astigmatism and source energy dispersion blurs for all the beamlets simultaneously.