SENSOR DIE WITH A DIAPHRAGM

A sensor die (100) includes a diaphragm (110) having a first membrane (130) and a second membrane (140) positioned within the first membrane (130). The first membrane (130) is deflectable in proportion with a differential pressure between a first side (112) of the diaphragm (110) and a second side (...

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Bibliographische Detailangaben
Hauptverfasser:	Fong, Jeffrey C, O'Brien, Daniel T
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A sensor die (100) includes a diaphragm (110) having a first membrane (130) and a second membrane (140) positioned within the first membrane (130). The first membrane (130) is deflectable in proportion with a differential pressure between a first side (112) of the diaphragm (110) and a second side (114) of the diaphragm (110) opposite the first side (112). The second membrane (140) is deflectable simultaneously with the first membrane (130) in proportion with an absolute pressure on the first side (112) of the diaphragm (110).