METHOD AND APPARATUS FOR CALIBRATING A SPECTRAL IMAGING DEVICE

Method for calibrating a spectral imaging device comprises forming first calibration light by illuminating a first calibration region of a calibration sample with illuminating light, forming second calibration light by illuminating a second calibration region of the calibration sample with the illuminating light, measuring a first spectrum of the first calibration light by using the spectral imaging device, measuring a second spectrum of the second calibration light by using the spectral imaging device, and determining or verifying a spectral calibration function of the spectral imaging device by comparing the measured spectra with reference spectra. The spectral calibration function specifies a relation, which associates values of a control parameter with actual spectral positions. The first calibration light has a first spectral peak at a first peak wavelength, and the second calibration light has a second spectral peak at a second peak wavelength.