GUIDE DEVICE, GUIDANCE METHOD, MEASUREMENT DEVICE, PRODUCT PRODUCTION EQUIPMENT, MEASUREMENT METHOD, PRODUCT PRODUCTION METHOD, AND PRODUCT QUALITY MANAGEMENT METHOD

A guiding device according to the present invention includes a guiding unit configured to guide a scanning position of a measurement unit with respect to a measurement target when a measurement unit configured to measure a physical quantity of the measurement target performs scanning. The guiding un...

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Bibliographische Detailangaben
Hauptverfasser: UEMATSU, Kento, TERADA, Kazuki, MATSUI, Yutaka, IMANAKA, Hiroki
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A guiding device according to the present invention includes a guiding unit configured to guide a scanning position of a measurement unit with respect to a measurement target when a measurement unit configured to measure a physical quantity of the measurement target performs scanning. The guiding unit includes at least two linear guide markers configured to guide the scanning position, and the at least two linear guide markers are arranged at positions ahead of a measurement position of the measurement unit in a scanning direction at predetermined intervals with the scanning position being interposed therebetween.