LEEM BASED HOLOGRAPHY

A particle beam system comprising a beam splitter 340,342 configured to split a particle beam 330 into a first particle beam 334 and a second particle beam 332, the first and second particle beams being coherent along at least a portion of their path lengths; a reference line 338 configured to enable transmission of the first particle beam; a sample line 336 configured to enable the second particle beam to interact with a sample 360; a delay segment configured to alter 366 a path length of the first particle beam in the reference line and/or to alter 364 a path length of the second particle beam in the sample line; and a beam combiner 344 configured to recombine a) the first particle beam after the reference line, and b) the second particle beam after the sample line, wherein the recombination of the first and second particle beams causes interference between the first and the particle beams. The system optionally comprises a sensor 380 configured to detect intensity of the interference between the first particle beam and the second particle beam.