MEMS DEVICE WITH MEMBRANE COMPRISING LASER STRUCTURED NANOSTRUCTURES AND METHOD FOR MANUFACTURING SAME

This disclosure concerns a method for producing a MEMS device (100), the method comprising a step of providing a substrate (110) comprising a first substrate surface (111) and an opposite second substrate surface (112), wherein the substrate (110) comprises a sacrificial layer (140) arranged at the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	WASISTO, Hutomo Suryo, STREB, Fabian, ANZINGER, Sebastian
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PUBLIC ADDRESS SYSTEMS TRANSPORTING
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