MEMS DEVICE WITH MEMBRANE COMPRISING LASER STRUCTURED NANOSTRUCTURES AND METHOD FOR MANUFACTURING SAME

MEMS DEVICE WITH MEMBRANE COMPRISING LASER STRUCTURED NANOSTRUCTURES AND METHOD FOR MANUFACTURING SAME

This disclosure concerns a method for producing a MEMS device (100), the method comprising a step of providing a substrate (110) comprising a first substrate surface (111) and an opposite second substrate surface (112), wherein the substrate (110) comprises a sacrificial layer (140) arranged at the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WASISTO, Hutomo Suryo, STREB, Fabian, ANZINGER, Sebastian
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
DEAF-AID SETS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PUBLIC ADDRESS SYSTEMS
TRANSPORTING
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Beschreibung
Zusammenfassung:This disclosure concerns a method for producing a MEMS device (100), the method comprising a step of providing a substrate (110) comprising a first substrate surface (111) and an opposite second substrate surface (112), wherein the substrate (110) comprises a sacrificial layer (140) arranged at the first substrate surface (111), and a step of depositing a membrane material layer (114) onto the sacrificial layer (140). The membrane material layer (114) forms a free-standing membrane structure (130). The method further comprises a step of creating nanostructures (150) protruding from the membrane material layer (114), wherein the nanostructures (150) are created by applying a laser structuring process.