VAPOR DEPOSITION APPARATUS AND TECHNIQUES USING HIGH PURITY POLYMER DERIVED SILICON CARBIDE

Organosilicon chemistry, polymer derived ceramic materials, and methods. Such materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Vapor deposition processes and articles formed by those processes utilizing such...

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Bibliographische Detailangaben
1. Verfasser: LAND, Mark S
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Organosilicon chemistry, polymer derived ceramic materials, and methods. Such materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Vapor deposition processes and articles formed by those processes utilizing such high purity SiOC and SiC.