SEMICONDUCTOR DIE WITH INTERCONNECT BUMP DESIGN EMPLOYING REPURPOSED SEED LAYER FOR FORMING ADDITIONAL SIGNAL PATHS TO BACK END-OF-LINE (BEOL) STRUCTURE, AND RELATED INTEGRATED CIRCUIT (IC) PACKAGE AND FABRICATION METHOD

A semiconductor die ("die") employing repurposed seed layer for forming additional signal paths to a back end-of-line (BEOL) structure of the die, and related integrated circuit (IC) packages and fabrication methods. A seed layer is repurposed that was disposed adjacent the BEOL interconne...

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Hauptverfasser: LI, Yue, SUN, Jinying, LISK, Durodami
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A semiconductor die ("die") employing repurposed seed layer for forming additional signal paths to a back end-of-line (BEOL) structure of the die, and related integrated circuit (IC) packages and fabrication methods. A seed layer is repurposed that was disposed adjacent the BEOL interconnect structure to couple an under bump metallization (UBM) interconnect without a coupled interconnect bump thus forming an unraised interconnect bump, to a UBM interconnect that has a raised interconnect bump. To couple the unraised interconnect bump to the raised interconnect bump, the seed layer is selectively removed during fabrication to leave a portion of the seed layer repurposed that couples the UBM interconnect that does not have an interconnect bump to the UBM interconnect that has a raised interconnect bump. Additional routing paths can be provided between raised interconnect bumps to the BEOL interconnect structure through coupling of UBM interconnects to an unraised interconnect bump.