STAGE DEVICE, CHARGED PARTICLE BEAM DEVICE, AND VACUUM DEVICE

Provided is a stage device capable of appropriately positioning an object. Thus, a stage device (10) is provided with: a fixed unit (20) including a top plate (22) including a magnetic material, a bottom plate (26) opposing the top plate (22), and a plurality of coils (28) provided on an upper surfa...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	TAKAHASHI, Motohiro
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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