STAGE DEVICE, CHARGED PARTICLE BEAM DEVICE, AND VACUUM DEVICE

Provided is a stage device capable of appropriately positioning an object. Thus, a stage device (10) is provided with: a fixed unit (20) including a top plate (22) including a magnetic material, a bottom plate (26) opposing the top plate (22), and a plurality of coils (28) provided on an upper surfa...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	TAKAHASHI, Motohiro
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	Provided is a stage device capable of appropriately positioning an object. Thus, a stage device (10) is provided with: a fixed unit (20) including a top plate (22) including a magnetic material, a bottom plate (26) opposing the top plate (22), and a plurality of coils (28) provided on an upper surface of the bottom plate (26); and a movable unit (100) comprising a support portion (101) for supporting an object (160) to be positioned, a plurality of first magnets (141) mounted to the upper surface of the support portion (101) and opposed to the top plate (22) to generate a first propulsion force (FA) against the top plate (22), and a plurality of second magnets (105) provided on a lower surface of the support portion (101) and opposed to the coil (28) to generate a second propulsion force (FB) between the coil (28) and the plurality of second magnets (105).