TEST METHOD
Provided is an inspection method for a liquid feeding device capable of preventing an increase in the number of components, a decrease in throughput, and an increase in a leakage source. The method includes: suctioning a fluid from a fluid tank into a first cylinder by driving a first plunger in a s...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | Provided is an inspection method for a liquid feeding device capable of preventing an increase in the number of components, a decrease in throughput, and an increase in a leakage source. The method includes: suctioning a fluid from a fluid tank into a first cylinder by driving a first plunger in a suction direction; driving the first plunger in a discharge direction after suction; stopping the first plunger for a predetermined first time; driving the first plunger in the discharge direction; and estimating a leakage amount in a flow path on an upstream side of a second check valve based on a detection value of a pressure detected by a pressure sensor from start of the driving of the first plunger in the discharge direction to end of the driving of the first plunger in the discharge direction. |
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