SEM IMAGE ENHANCEMENT

Disclosed herein is a method of reducing a sample charging effect in a scanning electron microscope (SEM) image, the method comprising:obtaining a first SEM image of a target feature on a sample from a first electron beam scan in a first scanning direction;obtaining a second SEM image of the target feature on the sample from a second electron beam scan in a second scanning direction different from the first scanning direction;aligning the first SEM image and the second SEM image; andgenerating an output image based a combination of the first SEM image and the second SEM image.