MEASURING DEVICE, MACHINING SYSTEM AND METHOD FOR ADJUSTING A MEASURING DEVICE
The invention relates to a measuring device (10; 10a) for a machining system (12; 12a) for machining a workpiece (14; 14a) by means of a high-energy machining beam (16; 16a), the measuring device (10; 10a) comprising: a beam generating unit (18; 18a) configured to generate a measurement beam (20; 20...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | The invention relates to a measuring device (10; 10a) for a machining system (12; 12a) for machining a workpiece (14; 14a) by means of a high-energy machining beam (16; 16a), the measuring device (10; 10a) comprising: a beam generating unit (18; 18a) configured to generate a measurement beam (20; 20a) and a reference beam (22; 22a) which can be made to interfere for the purposes of carrying out optical interference measurements such as optical coherence tomography; a measurement arm (24; 24a) which is optically connected to the beam generating unit (18; 18a) and in which the measurement beam (20; 20a) is optically guided such that the latter can be projected onto the workpiece (14; 14a); a reference arm (26; 26a) which is optically connected to the beam generating unit (18; 18a) and in which the reference beam (22; 22a) is optically guided; and a measurement interface (28; 28a), by means of which the measurement beam (20; 20a) can be coupled into the machining beam (16; 16a); wherein the measuring device (10; 10a) comprises a base module (30; 30a) and an interchangeable module (32; 32a) connectable or connected thereto. The interchangeable module (32; 32a) comprises a beam guiding section (48a) which comprises optical components (50a) for guiding the measurement beam (20a) and/or the reference beam (22a) and which is configured to form a central section (52; 52a) of the measurement arm (24; 24a) and/or reference arm (26; 26a). The invention further relates to a system having a measuring device (10; 10a) and a plurality of interchangeable modules (32, 32', 32"), a machining system (12; 12a), and a method for adjusting a measuring device (10; 10a). |
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