PELLICLE MEMBRANE

A pellicle membrane for a lithographic apparatus, wherein the pellicle membrane comprises metal silicide and a reinforcing network. The reinforcing network can be located between metal silicide layers. The reinforcing network can be irregular. The reinforcing network includes windows with a maximum...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	DONMEZ NOYAN, Inci, FERRE LLIN, Lourdes, ROLLIER, Anne-Sophie, AGRICOLA, Franciscus, Theodorus, GIESBERS, Adrianus, Johannes, Maria, DE GRAAF, Dennis, ANDE, Chaitanya Krishna, BIRON, Maxime, SI, Fai Tong, VAN DER WOORD, Ties, Wouter
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	A pellicle membrane for a lithographic apparatus, wherein the pellicle membrane comprises metal silicide and a reinforcing network. The reinforcing network can be located between metal silicide layers. The reinforcing network can be irregular. The reinforcing network includes windows with a maximum dimension of up to 20 microns. The reinforcing network includes windows having an average size of at least 5 microns.