A METHOD FOR PRODUCING A FILTER AND A FILTER

A method (100) for producing a filter (1), the method (100) comprisingproviding (S102) a first layer (30) above a substrate (10);providing (S104) a block copolymer layer (40) above the first layer (30);converting (S106) the block copolymer layer (40) to a mask (48) by selectively removing domains of...

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Bibliographische Detailangaben
Hauptverfasser:	HUMBERT, Aurelie, WIERINGA, Fokko, VAN ROY, Willem, LANGEREIS, Geert, SEEMA SASEENDRAN, Sandeep, CUMMINS, Cian
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A method (100) for producing a filter (1), the method (100) comprisingproviding (S102) a first layer (30) above a substrate (10);providing (S104) a block copolymer layer (40) above the first layer (30);converting (S106) the block copolymer layer (40) to a mask (48) by selectively removing domains of the block copolymer layer (40);etching (S108) pores (32) through the first layer (30) in regions exposed by the mask (48); andforming (S114) a channel (20) through the substrate (10), the channel (20) being configured to provide fluid communication between a first (21) and a second (22) end of the channel (20), the first end (21) of the channel (20) being directly below the etched pores (32) of the first layer (30),whereby fluid passing through the channel (20) and the pores (32) is filtered by the pores (32), when the filter (1) is in use.