POROUS GLASS BASE MATERIAL MANUFACTURING SYSTEM AND METHOD FOR MANUFACTURING GLASS BASE MATERIAL
A porous glass base material manufacturing system that does not require the manufacturing apparatus and building to be hazardous material-compatible and that can provide a stable supply of raw materials, even when organic siloxane raw material is used as raw materials to produce silica fine particle...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A porous glass base material manufacturing system that does not require the manufacturing apparatus and building to be hazardous material-compatible and that can provide a stable supply of raw materials, even when organic siloxane raw material is used as raw materials to produce silica fine particles is provided. The porous glass base material manufacturing system comprises a raw material supplying apparatus and a porous glass base material manufacturing apparatus. The raw material supplying apparatus comprises: a raw material tank in which organic siloxane raw material in a liquid state is stored and the remaining space is filled with inert gas; a liquid feed pump to pump the organic siloxane raw material from the raw material tank; a circulating piping and a branch piping through which the raw material pumped is passed; a liquid mass flow controller that controls the flow rate of organic siloxane raw material passed through the branch piping to a predetermined flow rate; and a vaporizer provided downstream of the mass flow controller to vaporize the organic siloxane raw material. The porous glass base material manufacturing apparatus is installed indoors in a building and equipped with a burner that combusts organic siloxane raw materials to produce silica fine particles. The raw material supplying apparatus is installed outdoors or indoors in a separate building. |
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