OPTICAL ELEMENT, PROJECTION OPTICAL UNIT AND PROJECTION EXPOSURE APPARATUS

An optical element for a projection exposure apparatus comprises a mirror body having an optically active surface. The mirror body comprises a base portion which carries a sensor system. The mirror body comprises an edge portion on which actuator connectors for connecting actuators to the optical el...

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Bibliographische Detailangaben
Hauptverfasser:	NEFZI, Marwène, KUGLER, Jens, FETZER, Matthias
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	An optical element for a projection exposure apparatus comprises a mirror body having an optically active surface. The mirror body comprises a base portion which carries a sensor system. The mirror body comprises an edge portion on which actuator connectors for connecting actuators to the optical element are provided. The base portion has greater stiffness than the edge portion. A stiffening rib structure is attached to the back side of the edge portion, which faces away from the optically active surface. The rib structure supports the edge portion on the base portion.