CHARGED PARTICLE ASSESSMENT METHOD AND SYSTEM
A charged particle assessment method for identifying candidate defects in samples by scanning a charged particle beam across a sample; the method comprising:obtaining a first reference image from a first region of the sample and a second reference image from a second region of the sample using a cha...
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| creator | DAVE, Dhara KUIPER, Vincent, Sylvester |
| description | A charged particle assessment method for identifying candidate defects in samples by scanning a charged particle beam across a sample; the method comprising:obtaining a first reference image from a first region of the sample and a second reference image from a second region of the sample using a charged particle assessment apparatus;obtaining a sample image from a third region of the sample using the charged particle assessment apparatus; andcomparing the sample image to the first reference image and to the second reference image to identify any candidate defects in the third region;wherein the first reference image and/or the second reference image are obtained with a higher fidelity than the sample image. |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_EP4376049A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>EP4376049A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_EP4376049A13</originalsourceid><addsrcrecordid>eNrjZNB19nAMcnd1UQhwDArxdPZxVXAMDnYNDvZ19QtR8HUN8fB3UXD0c1EIjgwOcfXlYWBNS8wpTuWF0twMCm6uIc4euqkF-fGpxQWJyal5qSXxrgEmxuZmBiaWjobGRCgBAHZ8JR8</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>CHARGED PARTICLE ASSESSMENT METHOD AND SYSTEM</title><source>esp@cenet</source><creator>DAVE, Dhara ; KUIPER, Vincent, Sylvester</creator><creatorcontrib>DAVE, Dhara ; KUIPER, Vincent, Sylvester</creatorcontrib><description>A charged particle assessment method for identifying candidate defects in samples by scanning a charged particle beam across a sample; the method comprising:obtaining a first reference image from a first region of the sample and a second reference image from a second region of the sample using a charged particle assessment apparatus;obtaining a sample image from a third region of the sample using the charged particle assessment apparatus; andcomparing the sample image to the first reference image and to the second reference image to identify any candidate defects in the third region;wherein the first reference image and/or the second reference image are obtained with a higher fidelity than the sample image.</description><language>eng ; fre ; ger</language><subject>BASIC ELECTRIC ELEMENTS ; CALCULATING ; COMPUTING ; COUNTING ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY ; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL ; PHYSICS</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240529&DB=EPODOC&CC=EP&NR=4376049A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,777,882,25545,76296</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20240529&DB=EPODOC&CC=EP&NR=4376049A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>DAVE, Dhara</creatorcontrib><creatorcontrib>KUIPER, Vincent, Sylvester</creatorcontrib><title>CHARGED PARTICLE ASSESSMENT METHOD AND SYSTEM</title><description>A charged particle assessment method for identifying candidate defects in samples by scanning a charged particle beam across a sample; the method comprising:obtaining a first reference image from a first region of the sample and a second reference image from a second region of the sample using a charged particle assessment apparatus;obtaining a sample image from a third region of the sample using the charged particle assessment apparatus; andcomparing the sample image to the first reference image and to the second reference image to identify any candidate defects in the third region;wherein the first reference image and/or the second reference image are obtained with a higher fidelity than the sample image.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CALCULATING</subject><subject>COMPUTING</subject><subject>COUNTING</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><subject>IMAGE DATA PROCESSING OR GENERATION, IN GENERAL</subject><subject>PHYSICS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNB19nAMcnd1UQhwDArxdPZxVXAMDnYNDvZ19QtR8HUN8fB3UXD0c1EIjgwOcfXlYWBNS8wpTuWF0twMCm6uIc4euqkF-fGpxQWJyal5qSXxrgEmxuZmBiaWjobGRCgBAHZ8JR8</recordid><startdate>20240529</startdate><enddate>20240529</enddate><creator>DAVE, Dhara</creator><creator>KUIPER, Vincent, Sylvester</creator><scope>EVB</scope></search><sort><creationdate>20240529</creationdate><title>CHARGED PARTICLE ASSESSMENT METHOD AND SYSTEM</title><author>DAVE, Dhara ; KUIPER, Vincent, Sylvester</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP4376049A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2024</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CALCULATING</topic><topic>COMPUTING</topic><topic>COUNTING</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><topic>IMAGE DATA PROCESSING OR GENERATION, IN GENERAL</topic><topic>PHYSICS</topic><toplevel>online_resources</toplevel><creatorcontrib>DAVE, Dhara</creatorcontrib><creatorcontrib>KUIPER, Vincent, Sylvester</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>DAVE, Dhara</au><au>KUIPER, Vincent, Sylvester</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>CHARGED PARTICLE ASSESSMENT METHOD AND SYSTEM</title><date>2024-05-29</date><risdate>2024</risdate><abstract>A charged particle assessment method for identifying candidate defects in samples by scanning a charged particle beam across a sample; the method comprising:obtaining a first reference image from a first region of the sample and a second reference image from a second region of the sample using a charged particle assessment apparatus;obtaining a sample image from a third region of the sample using the charged particle assessment apparatus; andcomparing the sample image to the first reference image and to the second reference image to identify any candidate defects in the third region;wherein the first reference image and/or the second reference image are obtained with a higher fidelity than the sample image.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng ; fre ; ger |
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| subjects | BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS |
| title | CHARGED PARTICLE ASSESSMENT METHOD AND SYSTEM |
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