EUV TRANSMISSIVE FILM

Provided is an EUV transmissive membrane that is less likely to generate particles in case the membrane is damaged by any possibility. The EUV transmissive membrane includes: a main layer composed of metallic beryllium that has a first surface and a second surface; and a pair of surface layers provi...

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Bibliographische Detailangaben
Hauptverfasser:	GORIKI Naoki, KASHIWAYA Toshikatsu, KONDO Atsuo, TANGE Shoji
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	Provided is an EUV transmissive membrane that is less likely to generate particles in case the membrane is damaged by any possibility. The EUV transmissive membrane includes: a main layer composed of metallic beryllium that has a first surface and a second surface; and a pair of surface layers provided on the first surface and the second surface of the main layer, each containing at least one fluoride selected from beryllium fluoride, beryllium fluoride nitride, beryllium fluoride oxide, and beryllium fluoride nitride oxide.