EUV-TRANSMISSIVE FILM, METHOD FOR USING SAME, AND EXPOSURE METHOD

Provided is an EUV transmissive membrane capable of suppressing EUV absorption by a protective layer, which has been a factor in reduction of EUV transmittance, thereby exhibiting high EUV transmittance during exposure. The EUV transmissive membrane includes a main layer having an EUV transmittance...

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Bibliographische Detailangaben
Hauptverfasser:	GORIKI, Naoki, CHAEN, Hiroki, KASHIWAYA, Toshikatsu, TANIMURA, Takashi
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	Provided is an EUV transmissive membrane capable of suppressing EUV absorption by a protective layer, which has been a factor in reduction of EUV transmittance, thereby exhibiting high EUV transmittance during exposure. The EUV transmissive membrane includes a main layer having an EUV transmittance of 85% or more at a wavelength of 13.5 nm, wherein the main layer is composed of a monolayer or a composite layer of two or more layers, and a protective layer that covers at least one side of the main layer, wherein the protective layer includes at least one selected from the group consisting of amorphous carbon, Cu, Al, and an organic resist as a main component.