DEPOSITION SOURCE AND DEPOSITION APPARATUS INCLUDING THE SAME

A deposition source includes a nozzle member, a vaporizing member, and a connecting member. The nozzle member includes a body portion including at least one first hole formed in a slot hole, a plurality of nozzles coupled to a first surface of the body portion and that eject a deposition material to...

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Bibliographische Detailangaben
Hauptverfasser:	SEOL, Jaewan, CHOI, Jonghyun, YOON, Intaek
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A deposition source includes a nozzle member, a vaporizing member, and a connecting member. The nozzle member includes a body portion including at least one first hole formed in a slot hole, a plurality of nozzles coupled to a first surface of the body portion and that eject a deposition material to an outside, and a crucible including at least one second hole overlapping the first hole and coupled to a second surface of the body portion by a fastening member inserted into the first hole and the second hole. The fastening member includes a bolt, a nut, and a washer. The vaporizing member is spaced apart from the nozzle member and stores the deposition material; and the connecting member connects the nozzle member and the vaporizing member. The deposition material moves through the connecting member.33