ALIGNMENT OF ELECTRON-OPTICAL ELEMENTS

ALIGNMENT OF ELECTRON-OPTICAL ELEMENTS

A stack of planar elements for a charged particle-optical module configured to project charged particles along a beam path, the stack comprising: a pair of adjoining planar elements arranged across the beam path, wherein one of the planar elements comprises an alignment fiducial and the other of the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DE LANGEN, Johannes, Cornelis, Jacobus, SCHEFFERS, Paul, IJmert, DEL TIN, Laura, KONING, Johan, Joost, STEUNEBRINK, Martin
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:A stack of planar elements for a charged particle-optical module configured to project charged particles along a beam path, the stack comprising: a pair of adjoining planar elements arranged across the beam path, wherein one of the planar elements comprises an alignment fiducial and the other of the planar elements comprises a monitoring aperture; wherein the pair of planar elements are positioned relative to each other such that the alignment fiducial and the monitoring aperture are aligned with each other in a direction substantially perpendicular to a plane of the planar elements.