STRAIN GAUGE

This strain gauge is mounted on a Roberval-type strain body, and has: a flexible substrate; and a resistor provided on the substrate and formed of a film containing Cr, CrN, and Cr2N, wherein the resistor has a film thickness of 6 nm to 100 nm.

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Bibliographische Detailangaben
Hauptverfasser:	YUGUCHI, Akiyo, ONO, Aya, KITAMURA, Atsushi, OGASA, Yosuke, ASAKAWA, Toshiaki
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	This strain gauge is mounted on a Roberval-type strain body, and has: a flexible substrate; and a resistor provided on the substrate and formed of a film containing Cr, CrN, and Cr2N, wherein the resistor has a film thickness of 6 nm to 100 nm.