PIEZOELECTRIC SUBSTRATE, PIEZOELECTRIC ELEMENT, AND PIEZOELECTRIC ELEMENT APPLICATION DEVICE

A piezoelectric substrate according to the present disclosure includes: a base body (2); an electrode (60A) formed at the base body; and a piezoelectric layer (70) formed at the electrode and containing potassium, sodium, and niobium. A value of IR2/IR1 obtained by dividing an integrated intensity I...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: OHASHI, Koji, HAMADA, Yasuaki, YANO, Yoshiki, KITADA, Kazuya
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A piezoelectric substrate according to the present disclosure includes: a base body (2); an electrode (60A) formed at the base body; and a piezoelectric layer (70) formed at the electrode and containing potassium, sodium, and niobium. A value of IR2/IR1 obtained by dividing an integrated intensity IR2 at a peak 2 by an integrated intensity IR1 at a peak 1, when a surface of the piezoelectric layer is measured by Fourier transform infrared spectroscopy, is less than 0.086. Here, the peak 1 has a strongest area intensity among peaks detected at wavenumbers of 475 cm-1 to 700 cm-1, and the peak 2 has an area intensity that is a sum of area intensities of peaks detected at wavenumbers of 1200 cm-1 to 1645 cm-1.