LASER IRRADIATION DEVICE, LASER IRRADIATION METHOD, AND SURFACE TREATED BY LASER IRRADIATION

PROBLEM TO BE SOLVED: To provide a laser irradiation apparatus which can suppress a local deterioration of surface quality of an irradiation object.SOLUTION: A laser irradiation apparatus irradiates an irradiation object O with a laser beam L. The apparatus comprises scanning pattern formation secti...

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Bibliographische Detailangaben
Hauptverfasser: HARAGUCHI, Manabu, TOSUE, Momo, MOMI, Kenjiro
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a laser irradiation apparatus which can suppress a local deterioration of surface quality of an irradiation object.SOLUTION: A laser irradiation apparatus irradiates an irradiation object O with a laser beam L. The apparatus comprises scanning pattern formation sections 20, 50 that change at least either of an emitting direction and a shift amount (size) of a laser beam periodically so that a position BS irradiated with a laser beam moves periodically along a predetermined scanning pattern C on a predetermined plane. And the apparatus comprises an irradiation control section 110 (TIG. 2) that stops irradiation of a laser beam directed to an excessive irradiation prevention area PA set in some area in the scanning pattern or makes an intensity of the laser beam lower in comparison with an intensity of a laser beam directed to an area other than the excessive irradiation prevention area.